Integrated Temperature and Hydrogen Sensors with MEMS Technology
نویسندگان
چکیده
منابع مشابه
Integrated Temperature and Hydrogen Sensors with MEMS Technology
In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, while the latter had the function of hydrogen sensing and is based on PdNi alloy film. The temperatu...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s18010094